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Electrical, Physical, and Chemical Characterization
Published in Robert Doering, Yoshio Nishi, Handbook of Semiconductor Manufacturing Technology, 2017
Dieter K. Schroder, Bruno W. Schueler, Thomas Shaffner, Greg S. Strossman
Elastic recoil detection (ERD) analysis takes advantage of the fact that elements in a material lighter than the primary ions will be forward scattered upon collision with the primaries. In conventional RBS, which uses 4He ions, a special case of ERD known as hydrogen forward scattering is often employed to quantify the hydrogen content of thin films.
Evolution of Rutherford’s ion beam science to applied research activities at GNS Science
Published in Journal of the Royal Society of New Zealand, 2021
John V. Kennedy, William Joseph Trompetter, Peter P. Murmu, Jerome Leveneur, Prasanth Gupta, Holger Fiedler, Fang Fang, John Futter, Chris Purcell
The elastic recoil detection analysis (ERDA) technique is similar in many aspects to RBS using the same Rutherford kinematic equations, except that forward scattering is used, and we now measure the recoiled ion. ERDA has been widely used to measure the hydrogen content with a limit of detection of 0.1 atomic% in semiconducting films such as SiC and GaN. Our ERDA measurements are typically carried out using 2.5 MeV 4He+ ions with a beam current of 10 nA and beam diameter of 0.5 mm. The angle of incidence with respect to the target surface is usually 20o, and the ERDA detector placed at 30o with respect to the beam direction. A mylar film of 10 μm thickness is attached in front of the ERDA detector to absorb all scattered and recoiled atoms except hydrogen. The SIMNRA software (Mayer 1999) can be used to fit the ERDA spectra which enables the extraction of the hydrogen concentrations with ∼ ppm level sensitivity upto a depth of ∼800 nm and with a depth resolution of ∼50 nm at the sample surface (Kennedy et al. 2002; Stoqurt and Szorenyi 2002; Kennedy et al. 2006).