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Fundamentals of Microfabrication Technologies
Published in Ghenadii Korotcenkov, Handbook of Humidity Measurement, 2020
Microtechnology and microfabrication processes are used to produce devices with dimensions ranging from micrometers to millimeters. Microfabrication processes can be effectively applied to yield a single device or thousands of devices such as actuators or different sensors (Eaton and Smith 1997; Bausells 2015; Loizeau et al. 2015). The so-called “batch processing,” that is, the fabrication of many devices in parallel, does not only lead to a tremendous cost reduction but also enables the production of array structures or large device series with minute-fabrication tolerances (Hierlemann 2004). In high-volume production, the advantage of batch processing is paramount, and the high development and setup costs amortize. In Volume 2 of this series it was shown that microfabrication techniques can be also used to produce humidity sensors (Fenner and Zdankiewicz 2001). Such approach allows one to significantly improve sensor characteristics in comparison to conventionally fabricated devices, and to develop devices with new functionality that cannot be realized in conventional fabrication technology. Key advantages of microfabricated humidity sensors include the small size of the device and sampling volume, and high reproducibility of transducer/sensor characteristics due to the precise geometric control in the fabrication steps.
Locomotor characteristics of the women’s inaugural super league competition and the rugby league world cup
Published in Journal of Sports Sciences, 2020
Stacey Emmonds, Dan Weaving, Nicholas Dalton-Barron, Gordon Rennie, Richard Hunwicks, Jason Tee, Cameron Owen, Ben Jones
Each player wore a microtechnology technology unit (Optimeye S5, Catapult Innovations, Melbourne, Australia) as per manufacturer instructions. Each device contained a Global Positioning Systems (GPS) and Global Navigation Satellite System (GLONASS) sampling at 10 Hz and a tri-axial accelerometer, magnetometer and gyroscope, each sampling at 100 Hz. The test–retest reliability of the specific 10 Hz GPS has been reported to be acceptable to measure instantaneous speed across a range of starting velocities (coefficient of variation: 2.0 to 5.3%) (Scott et al., 2016; Varley et al., 2012). The mean ± standard deviation (SD) number of satellites and horizontal dilution of precision (HDOP) during data collection were 11 ± 1 and 0.8 ± 0.1, respectively. Greater than 6 connected satellites and HDOP values less than 1 are considered ideal for GPS data collection (Malone et al., 2017).
Ultrasensitive detection of low-dose gamma radiation using polymeric thin films on microelectromechanical system-based sensors
Published in Journal of Nuclear Science and Technology, 2022
Khaled Shamma, Hamad Albrithen, Bander S. AlOtaibi, Abdullah Alodhayb
Gamma radiation is one of the most important types of these rays. Gamma rays can deeply penetrate a material, and contact with it causes ionization and deformities in atomic lattices [4–6]. Gamma rays also produce changes structural, morphological, electrical, and optical properties of materials and thin films like TiO2, CuO, Fe2O3, and Mg-doped ZnO [7–11]. According to the most important principle in radiation protection (i.e. the as low as reasonably achievable principle), this study aims to detect low gamma doses using a polymeric thin film on a microelectromechanical system (MEMS)-based microcantilever. Various methods for detecting nuclear radiation, including photonic devices, semiconductor optoelectronics, photodiodes, and phototransistors are available [12–16], and some of these techniques are suitable for detecting low doses, such as NaI scintillation detector, thermoluminescence detectors, fluorescent-based on aggregation-induced emission, and quartz tuning fork [17–19]. The sensor in this study is highly sensitive and compact. The development of such devices depends heavily on the materials with which the rays interact. However, radiation exposure has a considerable effect on the optical, electrical, and other physical properties of materials [20–26]. In microtechnology, MEMS-based microcantilever sensors are essential devices because of their ultrasensitive mass-detection capabilities owing to mechanical stress, and devices in the zeptogram range have been reported [20,21,27–29]. MEMS-based microcantilever devices have been developed for many precise applications, including bio and chemical sensing, scanning probe microscopy, and medical research [30–32].