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Rapid Thermal Processing
Published in Robert Doering, Yoshio Nishi, Handbook of Semiconductor Manufacturing Technology, 2017
For many years RTP has been used extensively in the formation of contacts for MOS devices. Although the benefits of RTP are usually thought of as arising from its enabling capability for thermal budget reduction, the ability to provide a very clean process gas ambient is also of great significance. Indeed, the first large-scale application of RTP for volume manufacturing arose in the formation of silicide films, a process that can be exceedingly sensitive to oxygen or water vapor contamination. Here, RTP systems, with their small chamber volumes, could easily provide very low oxygen concentrations that were problematic for large batch furnaces [390,391]. The RTP approach was also helpful because high annealing temperatures could be used, yet film agglomeration effects could be minimized [392,393]. Since that era, RTP has been the mainstay for formation of titanium silicide, which was followed by the widespread adoption of cobalt silicide at the 0.25 μm node, and now with the introduction of nickel silicide at the 90 nm node. These materials have typically been fabricated through the two-step self-aligned silicide (salicide) process [390]. The process starts with deposition of a metal layer, followed by an initial RTP process (RTP1) in which the metal reacts with silicon in order to form a silicide phase. The next step involves selective etching that removes unreacted metal and other by-products. The final step is a second RTP process (RTP2), which converts the silicide to the final phase of silicide that is desired. For both Co and Ni silicides, it was initially thought that a single-RTP step approach might suffice, but in practice the need to provide a robust manufacturing process led to adoption of two-stage approaches [394–397].
Numerical modelling of spoolable thermoplastic composite pipe (TCP) under combined bending and thermal load
Published in Ships and Offshore Structures, 2022
James C. Hastie, Igor A. Guz, Maria Kashtalyan
‘Reinforced thermoplastic pipe (RTP)’ is a term for pipe resembling the TCP arrangement consisting of layers of unidirectional tape-wound aramid/high-density polyethylene (HDPE) with HDPE liners. Bai et al. (2015a) developed a simplified model for ovalisation instability of RTP under bending based on the metallic pipe theory of Kyriakides and Ju (1992) and Ju and Kyriakides (1992). Composite layers were modelled as HDPE with a reduction factor for omitted fibres. Yu et al. (2015) studied the flexural behaviour of RTP with different diameter-to-thickness ratios and ply angles by FEA. They accounted for strain-dependent behaviour and geometric nonlinearity in their shell model. Cao et al. (2017) investigated the bending of RTP during pipe-lay installation by numerical simulations incorporating validated nonlinear vessel motions. RTP behaviour under bending combined with external pressure (Bai et al. 2015b) or tension (Bai et al. 2014) has been investigated.
Study on reinforced thermoplastic pipe under combined tension and internal pressure
Published in Ships and Offshore Structures, 2018
Hongdong Qiao, Yin Zhang, Yong Bai, Peng Cheng, Yutian Lu, Peihua Han, Gao Tang
Reinforced thermoplastic pipe (RTP) is a multi-layered composite pipe. Serving as an alternative to conventional steel pipes, RTP has been increasingly applied in the oil and gas industry due to its better resistance to corrosion and internal pressure. A typical configuration of RTP includes an inner layer, an outer layer and an even number of reinforcement layers in the middle. The inner layer and outer layer are usually made of high-density polyethylene (HDPE), while the reinforcement layers consist of contra-rotation helically wound tapes. The reinforcement tapes with high tensile strength wires, which provides high internal pressure resistance, are embedded in the matrix of HDPE. The inner layer provides leak-proof capacity and corrosion resistance, while the outer layer provides external protection (Kruijer et al. 2005).
Analysis of the mechanical properties of a reinforced thermoplastic composite pipe joint
Published in Ships and Offshore Structures, 2021
Wenshu Liu, Yong Bai, Yifan Gao, Xianni Song, Zhiping Han
Reinforced thermoplastic composite pipe (RTP), also known as flexible composite pipe, is a kind of coiled continuous pipeline product, which is composed of reinforced thermoplastic lining, reinforced layer and protective layer. Actually, the RTP has been widely used in petroleum, natural gas, aerospace and other fields because of its high strength and good corrosion resistance (Bai et al. 2017).