Explore chapters and articles related to this topic
Physical Vapor Thin-Film Deposition Techniques
Published in David A. Cardwell, David C. Larbalestier, Aleksander I. Braginski, Handbook of Superconductivity, 2023
Glow discharge: The regime of glow discharge owes its name to the plasma gas emitting light. In this regime, a stable plasma is present. The secondary electrons generate ions in the plasma that are accelerated towards the target. At the target, electrons and particles are removed (Figure E4.2.6a). The latter form the film on the substrate opposite the target (Figure E4.2.7). In the normal glow regime, an increase in the energy leads to an increase in the current due to an increase in the plasma area. The target is fully covered with a plasma in the regime of abnormal discharge. The abnormal discharge represents the regime of homogeneous sputter deposition, where the energy of the particles can be modified by modifying the potential at the cathode. The cathode fall potential increases rapidly with current, and the dark space shrinks.
Plasma Surface Treatment to Enhance Adhesive Bonding
Published in A. Pizzi, K. L. Mittal, Handbook of Adhesive Technology, 2017
A glow discharge is an ionized gas consisting of equal concentrations of positive and negative charges and a large number of neutral species. It is generated by applying a potential difference (of a few hundred volts to a few kilovolts) between two electrodes that are inserted in a cell filled with a gas (an inert gas or a reactive gas) at a pressure ranging from a few millitorr to 10 torr [108]. Due to the potential difference, electrons emitted from the cathode by the cosmic radiation are accelerated away from the cathode, and give rise to collisions with the gas atoms or molecules (excitation, ionization, dissociation). The excitation collisions give rise to excited species, which can decay to lower levels by the emission of light. The ionization collisions create ion–electron pairs. The ions are accelerated toward the cathode, where they release secondary electrons. These electrons are accelerated away from the cathode and can give rise to more ionization collisions. In its simplest form, the combination of secondary electron emission at the cathode and ionization in the gas gives rise to self-sustained plasma [109], as shown in Figure 3.2.
Sensor Technologies
Published in Gábor Harsányi, Polymer Films in Sensor Applications, 2017
The glow discharge, or so-called plasma polymerization process [26,28,29], is similar to the plasma-enhanced chemical vapour deposition, and it can be performed in PECVD and RF sputtering equipment, which is widely used in the fabrication of electronic components and integrated circuits (see Sections 1.1 and 1.3). The reactor chamber has to be evacuated to 10−2 Pa, after which the monomer gas will flow in up to a pressure of 1–20 Pa. A high voltage RF source will then be switched on with a capacitive coupling of the glow discharge.
Influence of the Hydrogen Isotope Affinity of the Cathode Coating Material on the Neutron Production Rate in the Glow Discharge–Type Fusion Neutron Source
Published in Fusion Science and Technology, 2023
Toshiro Sakabe, Yasuyuki Ogino, Keisuke Mukai, Juro Yagi, Mahmoud Bakr
The glow discharge–type fusion neutron source, based on inertial electrostatic confinement, is a system to produce nuclear fusion reactions and generate neutrons.[1] In the device, ions, such as deuterium (D) and/or tritium (T), are ionized by applying several milliamps of current on the cathode and tens of kilovolts of voltage between the cathode and anode to induce the glow discharge and spark plasma. The established electric field between the electrodes accelerates these ions. During the glow discharge, ions and different neutral particles gain energy throughout the atomic and molecular processes, such as ionization, dissociation, and charge exchange reactions.[2] Consequently, fusion reactions are induced by highly energetic particles. This neutron source is much simpler and more compact in configuration than existing sources, such as accelerator-based neutron sources and nuclear fission reactor–type neutron sources. Especially in comparison with accelerator-based fusion neutrons sources, such as FNS,[3] FNG,[4] OKTAVIAN,[5] and RTNS,[6] these advantages of the glow discharge–type fusion neutron source have critical meanings.