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Finite element analysis of ultrasonic vibration-assisted microstructure hot glass embossing process
Published in Australian Journal of Mechanical Engineering, 2019
LanPhuong Nguyen, Ming-Hui Wu, Chinghua Hung
Nowadays, Field Emission Displays (FED) have been widely used in television, computers as well as in laboratories and medical applications. Figure 1 shows the three parts of the FED screen (http://escience.anu.edu.au/lecture/cg/Display/FED.en.html). Microtips, so-called electron guns, are on the cathode, which emit electrons. In order to manufacture these microstructures, lithography etching technology and micro-machining technology have been applied. However, these methods are usually complex and high cost. Recently, hot embossing technique has been proposed to fabricate microstructures on glass substrate. Compared to the above methods, hot embossing is more simple, productivity and the quality of final products is better. Especially, micro-formability of glass material could be improved with the assistance of ultrasonic vibration.