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Electronic Materials and Properties
Published in Michael Pecht, Handbook of Electronic Package Design, 2018
Jillian Y. Evans, John W. Evans
Several different materials are used for conformal coatings. Printed wiring assemblies utilize many different materials, including acrylics, polyurethane, silicones, epoxies, fluorocarbons, and parylene. With the exception of parylene, these materials, as conformal coatings, are generally applied as liquids and cured to their final state using elevated temperature or ultraviolent curing. Parylene is applied using vapor deposition [91, 99]. Conformal coatings are generally applied in a thin layer ranging from 1 to 8 mils for most materials [85].
Flexible Parylene-C Material and Its Applications in MOSFETs, RRAMs, and Sensors
Published in Run-Wei Li, Gang Liu, Flexible and Stretchable Electronics, 2019
Yimao Cai, Min Lin, Qingyu Chen
Parylene-C offers a lot of advantages, including relatively low cost, excellent biocompatibility and chemical stability, brilliant mechanical flexibility, and conformal coverage with various substrates, which can be used for different applications and may offer unique possibilities. The chapter gives a broad summary of parylene-C-based devices used in the field of MOSFETs, RRAMs, and sensors. The device structures, working principle, and the advantages of parylene-C-based devices are described in detail.
Substrate Technology
Published in Yufeng Jin, Zhiping Wang, Jing Chen, Introduction to Microsystem Packaging Technology, 2017
Yufeng Jin, Zhiping Wang, Jing Chen
Parylene has good biocompatibility (for C-typed parylene), an outstanding moisture barrier, excellent chemical inert ness, and extremely high dielectric strength. Additionally, parylene offers good conformability and can be easily patterned by an O2 enrolled dry etching process. All of those characteristics make parylene superior to other materials in the applications of flexible microdevices, especially implantable microelectrode arrays (MEAs).
Enhenced cell adhesion on collagen I treated parylene-C microplates
Published in Journal of Biomaterials Science, Polymer Edition, 2021
Lijun Zhao, Weiwei Lan, Xiao Dong, Han Xu, Lili Wang, Yan Wei, Jinchuan Hou, Di Huang, Weiyi Chen
Chloro-p-xylylene, also referred to as parylene-C, is one of such potential candidate for the manufacture of independent biomedical devices. Parylene-C is a thermoplasticand transparent polymer that is extensively used as a coating for insulating implantable biomedical devices [20]. In addition, parylene-C is chemically inert and nonbiodegradable. Parylene-C can be vapor-deposited onto substrates to generate uniform, pin hole-free membranes that can be subsequently dry-etched using oxygen plasma to yield microscale features and patterns that are ideal for culturing cells [21]. The all-carbon structural backbone, high molecular weight, and nonpolar entities make parylene-C highly resistant to most chemicals, as well as to fungal and bacterial growth. In addition to having conducive biochemical properties, parylene-C has a Young’s modulus of ∼4 GPa [1] (compared to 0.75 MPa for PDMS [22]) making it mechanically robust and highly suitable for fabricating stable and reusable microfluidic devices or stencils [1–5,21].
Increasing silicone mold longevity: a review of surface modification techniques for PDMS-PDMS double casting
Published in Soft Materials, 2021
Ali Ansari, Rajiv Trehan, Craig Watson, Samuel Senyo
The parylene C which is a polymer comprised of poly(para-xylylene) is a common debonding material widely popular for its ease of use and inert chemistry.[18] This treatment is easily applied using chemical vapor deposition and has been used extensively to coat silicon wafers and PDMS. Parylene has favorable properties such as optical clarity, chemical inertness, hydrophobicity, and is a biocompatible chemical.[18] The chemistry has been shown to be transferrable to coating PDMS, as the machinery and technology all already exist, and as PDMS has previously been shown to be capable of silanization.[7,54] Similarly, polyethylene glycol (PEG) has been used as a protein anti-stiction layer in a variety of biomedical applications.[55–57] As a debonding layer, PEG-coatings allows PDMS-PDMS casting of high fidelity microneedles at sub-millimeter to millimeter scale.[57] As PEG is used for clinical applications, it is a safe and effective long-term surface treatment for bioMEMs.[2]