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Processing of MEMS and NEMS
Published in Anwar Sohail, Raja M Yasin Anwar Akhtar, Raja Qazi Salahuddin, Ilyas Mohammad, Nanotechnology for Telecommunications, 2017
An adaptation of lithography to nanoscale, micro-imprint lithography is based on inscribing a pattern onto a rubber surface, which is then coated with a molecular ink. This rubber stamp can then be used to print on metals, polymers, or ceramic surfaces. A different nanoscale lithography, dip-pen lithography, utilizes a reservoir of atoms or molecules (the ink), stored on the top of SPM tip.58 When the tip is moved across a surface, such molecules are left behind in desired lines or patterns (Figure 9.3). Dip-pen nanolithography can be used for semiconductor patterning and biomedical and pharmaceuticals development. A commercial product of dip-pen nano-lithography is available from Nanoink™ (Skokie, IL). The print arrays of this commercial dip-pen system (DPN 5000™) can be active or passive, and can contain up to 55,000 pens. Dip-pen inks include those with proteins, DNA, nanoparticles, and polymers. The main advantages of this technology are the ability to use any material as ink, and to write on any surface as substrate. On-wire lithography,58 the patterning of oligonucleotides on metal and insulators,59 and DPN etch resist60 are variations of dip-pen nanolithography.
Fabrication of BioMEMS Devices
Published in Simona Badilescu, Muthukumaran Packirisamy, BioMEMS, 2016
Simona Badilescu, Muthukumaran Packirisamy
In array approach, it is possible to scale up the number of tips in the order of fifty thousand. The versatility of dip pen nanolithography offers a number of benefits over other techniques, making it a leading method of nanofabrication. This method could yield a resolution of features as small as 14 nm, and spatial resolution of 5 nm. Figure 7.44 shows the reservoir-integrated DPN system in which ink from a reservoir is fed to the tip through a set of microfluidic channels.
Design and experimental setup of a new concept of an aerosol-on-demand print head
Published in Aerosol Science and Technology, 2022
Ingo Sieber, David Zeltner, Martin Ungerer, Achim Wenka, Tim Walter, Ulrich Gengenbach
Functional printing of novel nanomaterials has become increasingly important for developments in printed electronics (Das and He 2021; Suganuma 2014; Wu 2017; Choi et al. 2015; Magdassi and Kamyshny 2017). The use of inks with special chemical, physical or optical properties enables the printing of novel functional structures (Sirringhaus and Shimoda 2003; Sieber, Thelen, and Gengenbach 2020a, 2020b; Magdassi 2010). Das and He (2021) forecast that the market for organic, potentially printed electronics exceeds a volume of $37 billion in 2019 with a predicted market growth of $74 billion in 2030. Printed functional elements such as conductive tracks and devices such as resistors and transistors require a high quality of line width, edges and layer thickness for reproducible electrical properties (Subramanian 2008; Salary et al. 2017). Although drop-on-demand inkjet printing has advanced a high level of development, the achievable quality and structural resolution is still orders of magnitude below that of silicon technology (Duineveld 2003; Reinhold 2017). Methods for printing fine structures with higher resolution are electrohydrodynamic printing (EHD printing), ultrasonic plotting and dip pen nanolithography. Electrohydrodynamic printing uses an electric field to generate droplets in the femtoliter range, achieving linewidths in the single micrometer range (Yokota et al. 2013; SIJTechnology 2021). The SonoPlot microplotter (Sonoplot 2021) allows line widths down to 5 µm to be drawn using an ultrasonically driven micropipette in contact with the substrate surface (Larson, Gillmor, and Lagally 2004). Another high-resolution printing method working in contact with the substrate surface is dip-pen nanolithography. With this method derived from atomic force microscopy linewidths down to sub 50 nm can be achieved (Liu et al. 2019). However, these high resolution methods require either a close distance (EHD printing) or even contact to the substrate surface. Hence, they are preferably applied to highly planar substrates.