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On-Line Monitors
Published in Tadahiro Ohmi, Ultraclean Technology Handbook, 2017
Makoto saito, Masami Miura, Yoshio Senoo, Yoshiki Shibata, Hirotake Shigemi, Toshio Kumagai, Takashi Sasaki, Toshiki Manabe, Seiichi Inagaki, Sankichi Takahashi, Toshihiko Kaneko, Makoto Satoda, Shin’ichi Akazawa, Toshiki Manabe, Akira Yamada
Figure 1 is a block diagram of a water treatment process using ozone for the fabrication of integrated circuits on wafers. Ozone is injected into the ultrapure water. Purified oxygen gas is converted to O2 + O3 gas with a pressure of approximately 0.7 kgf cm−2 by the ozone generator. The gas is further compressed to 6 kgf cm−2 by a compressor, fed to a gas injector, and mixed with ultrapure water. A bleed line is also provided to remove the air bubbles generated within the piping downstream of the gas injector. The ultrapure water injected with ozone is fed directly to the use point. An ozone monitor is arranged to detect the concentration of ozone. The ozonated ultrapure water is recirculated, and the residual ozone is decomposed by ultraviolet (UV) lamp as it is returned to the ultrapure water tank.
Determination of the collision rate coefficient between charged iodic acid clusters and iodic acid using the appearance time method
Published in Aerosol Science and Technology, 2021
Xu-Cheng He, Siddharth Iyer, Mikko Sipilä, Arttu Ylisirniö, Maija Peltola, Jenni Kontkanen, Rima Baalbaki, Mario Simon, Andreas Kürten, Yee Jun Tham, Janne Pesonen, Lauri R. Ahonen, Stavros Amanatidis, Antonio Amorim, Andrea Baccarini, Lisa Beck, Federico Bianchi, Sophia Brilke, Dexian Chen, Randall Chiu, Joachim Curtius, Lubna Dada, Antonio Dias, Josef Dommen, Neil M. Donahue, Jonathan Duplissy, Imad El Haddad, Henning Finkenzeller, Lukas Fischer, Martin Heinritzi, Victoria Hofbauer, Juha Kangasluoma, Changhyuk Kim, Theodore K. Koenig, Jakub Kubečka, Aleksandr Kvashnin, Houssni Lamkaddam, Chuan Ping Lee, Markus Leiminger, Zijun Li, Vladimir Makhmutov, Mao Xiao, Ruby Marten, Wei Nie, Antti Onnela, Eva Partoll, Tuukka Petäjä, Vili-Taneli Salo, Simone Schuchmann, Gerhard Steiner, Dominik Stolzenburg, Yuri Stozhkov, Christian Tauber, António Tomé, Olli Väisänen, Miguel Vazquez-Pufleau, Rainer Volkamer, Andrea C. Wagner, Mingyi Wang, Yonghong Wang, Daniela Wimmer, Paul M. Winkler, Douglas R. Worsnop, Yusheng Wu, Chao Yan, Qing Ye, Kari Lehtinen, Tuomo Nieminen, Hanna E. Manninen, Matti Rissanen, Siegfried Schobesberger, Katrianne Lehtipalo, Urs Baltensperger, Armin Hansel, Veli-Matti Kerminen, Richard C. Flagan, Jasper Kirkby, Theo Kurtén, Markku Kulmala
Ozone was measured with an ozone monitor (Thermo Environmental Instruments TEI 49 C). Two Atmospheric Pressure Interface Time Of Flight mass spectrometers (APi-TOF, Junninen et al. 2010) measured negatively and positively charged clusters, and an APi-TOF coupled with a nitrate chemical ionization unit (nitrate-CIMS, nitrate-CI-APi-TOF, Jokinen et al. 2012) to measure the gas-phase concentration of HIO3. The calibration of the nitrate-CIMS follows Kürten et al. 2012. Briefly, the concentration of HIO3 is estimated from where [HIO3] is the concentration of HIO3; C is the calibration factor estimated as 8.09 × 109 molecules cm−3 by measurements of sample gas with known amount of sulfuric acid; different anion concentrations were determined from the signals measured by the nitrate-CIMS. The sampling line losses are incorporated into the calibration factor and the overall systematic uncertainty is estimated to be −33%/+50% (3σ). H2SO4 is a well-known compound that is kinetically detected by nitrate-CIMS (Jokinen et al. 2012). To show that HIO3 is also detected at the kinetic limit, we further calculate the dissociation enthalpies of HIO3NO3-, the major iodic acid peak, using quantum chemical calculations (details provided in the next section). The calculated dissociation enthalpies to 1) HIO3 + NO3- and 2) IO3- + HNO3 are 30.9 and 25.7 kcal mol−1, respectively, which suggests that the second pathway is the dominant fragmentation pathway in our instrument. As the major fragment, IO3-, is efficiently detected in our instrument, HIO3 can be considered kinetically detected, similar to H2SO4. Therefore, we adopted the calibration factor of H2SO4 to HIO3.